Large area diffraction-based inspection of submicron periodic structures

Reference:

Drzik, M., Satka, A., Hasko, D., Kovac, J., Uherek, F., Allsopp, D. W. P., Abbott, S. J. and Hubbard, G., 2008. Large area diffraction-based inspection of submicron periodic structures. Microelectronic Engineering, 86 (4-6), pp. 1025-1028.

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Official URL:

http://dx.doi.org/10.1016/j.mee.2008.12.041

Abstract

An experimental study of diagnostics possibilities of periodic structures using visible light diffraction principles is presented. The goal of the study is to develop a simple method suitable for use in the inspection of large scale area periodically structured surfaces. It is shown that diffraction-based methods can be applied for surface feature size determination in the submicron region as well as for assessment of the surface profile modulation depth. In order to observe the periodic structure defects on the whole surface of 6-8 inch wafers, an optical filtration set-up is proposed using a white light illumination source. Diffraction efficiency has been acquired by photoelectric sensing of laser beam diffraction. Determined values, - of both the surface feature size and the depth of modulation coincide well with that obtained by AFM and SEM.

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