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Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications


Reference:

Kloss, S., Lewis, R. W. C., Dent, A., Weston, N., Jonas, K., Bowen, C. R., Hand, D. P. and Shephard, J. D., 2009. Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications. In: ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102. Orlando: Laser Institute of America, pp. 1194-1203.

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Abstract

This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.

Details

Item Type Book Sections
CreatorsKloss, S., Lewis, R. W. C., Dent, A., Weston, N., Jonas, K., Bowen, C. R., Hand, D. P. and Shephard, J. D.
DepartmentsFaculty of Engineering & Design > Mechanical Engineering
Research CentresCentre for Advanced Sensor Technologies (CAST)
Materials Research Centre
StatusPublished
ID Code19763
Additional Information28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009. 2-5 November 2009. Orlando, FL, United States.

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