Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications
Kloss, S., Lewis, R. W. C., Dent, A., Weston, N., Jonas, K., Bowen, C. R., Hand, D. P. and Shephard, J. D., 2009. Electrode ablation on piezoelectric ceramics by NS-pulsed laser ablation for sensor applications. In: ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102. Orlando: Laser Institute of America, pp. 1194-1203.
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This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.
|Item Type||Book Sections|
|Creators||Kloss, S., Lewis, R. W. C., Dent, A., Weston, N., Jonas, K., Bowen, C. R., Hand, D. P. and Shephard, J. D.|
|Departments||Faculty of Engineering & Design > Mechanical Engineering|
|Research Centres||Centre for Advanced Sensor Technologies (CAST)|
Materials Research Centre
|Additional Information||28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009. 2-5 November 2009. Orlando, FL, United States.|
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