Integration of Individual Nanoscale Structures into Devices Using Dynamic Nanostenciling
Egger, S., Ilie, A., Machida, S. and Nakayama, T., 2008. Integration of Individual Nanoscale Structures into Devices Using Dynamic Nanostenciling. IEE, 158 - 159.
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We succeeded in integrating individual, pre-existing nanostructures into functional devices using ultrahigh vacuum dynamic nanostenciling. Nanostructures are first located via atomic force microscopy (AFM), while device elements are added step by step, with an achieved positional accuracy of 20 nm. Electronic transport, potentiometry, and scanning Kelvin probe can be used for control at any fabrication stage.
|Item Type||Conference or Workshop Items (UNSPECIFIED)|
|Creators||Egger, S., Ilie, A., Machida, S. and Nakayama, T.|
|Departments||Faculty of Science > Physics|
|Additional Information||2nd IEEE International Nanoelectronics Conference, 2008. INEC 2008. 24-27 March 2008. Shanghai, China.|
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