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A new tool for nondestructive monitoring of ion implantation


Reference:

Coleman, P., Burrows, C. P., Knights, A. P., Gwilliam, R. M., Sealy, B. J., Goldberg, R. D., Al-Bayati, A., Foad, M. and Murrell, A., 2000. A new tool for nondestructive monitoring of ion implantation. In: Conference on Ion Implantation Technology, 2000, 2000-09-22.

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Official URL:

http://dx.doi.org/10.1109/.2000.924238

Details

Item Type Conference or Workshop Items (Paper)
CreatorsColeman, P., Burrows, C. P., Knights, A. P., Gwilliam, R. M., Sealy, B. J., Goldberg, R. D., Al-Bayati, A., Foad, M. and Murrell, A.
DOI10.1109/.2000.924238
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code21735

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