A new tool for nondestructive monitoring of ion implantation
Reference:
Coleman, P., Burrows, C. P., Knights, A. P., Gwilliam, R. M., Sealy, B. J., Goldberg, R. D., Al-Bayati, A., Foad, M. and Murrell, A., 2000. A new tool for nondestructive monitoring of ion implantation. In: Conference on Ion Implantation Technology, 2000, 2000-09-22.
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Official URL:
http://dx.doi.org/10.1109/.2000.924238
Details
| Item Type | Conference or Workshop Items (Paper) |
| Creators | Coleman, P., Burrows, C. P., Knights, A. P., Gwilliam, R. M., Sealy, B. J., Goldberg, R. D., Al-Bayati, A., Foad, M. and Murrell, A. |
| DOI | 10.1109/.2000.924238 |
| Departments | Faculty of Science > Physics |
| Refereed | Yes |
| Status | Published |
| ID Code | 21735 |
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