Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates

Reference:

Cummings, C. Y., Frith, P. E., Zoppi, G., Forbes, I., Rogers, K. D., Lane, D. W. and Marken, F., 2011. Rocking disc electro-deposition of copper films on Mo/MoSe2 substrates. Thin Solid Films, 519 (21), pp. 7458-7463.

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Official URL:

http://dx.doi.org/10.1016/j.tsf.2010.12.107

Abstract

A novel electro-deposition method based on a rocking disc system with /3 amplitude and variable frequency is introduced. Uniform copper films were deposited from a 0.1 M CuSO4/3.0 M NaOH/0.2 M sorbitol bath directly onto 12.1 cm2 Mo/MoSe2 substrates with X-ray diffraction showing a thickness variation of 5% over this area. Investigation of the mass transport conditions suggests (i) uniform diffusion over the sample, (ii) a rate of mass transport proportional to the square root of the rocking rate, and (iii) turbulent conditions, which are able to dislodge gas bubbles during electro-deposition.

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