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Synthesis, characterization, and materials chemistry of group 4 silylimides


Reference:

Cosham, S. D., Johnson, A. L., Molloy, K. C. and Kingsley, A. J., 2011. Synthesis, characterization, and materials chemistry of group 4 silylimides. Inorganic Chemistry, 50 (23), pp. 12053-12063.

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Official URL:

http://dx.doi.org/10.1021/ic2015644

Abstract

This paper focuses on the development of potential single source precursors for M-N-Si (M = Ti, Zr or Hf) thin films. The titanium, zirconium, and hafnium silylimides (Me(2)N)(2)MNSiR(1)R(2)R(3) [R(1) = R(2) = R(3) = Ph, M = Ti(1), Zr (2), Hf (3); R(1) = R(2) = R(3) = Et, M = Ti (4), Zr (5), Hf (6); R(1) = R(2) = Me, R(3) = (t)Bu, M = Ti (7), Zr (8), Hf (9); R(1) = R(2) = R(3) = NMe(2), M = Ti (10), Zr (11), Hf (12)] have been synthesized by the reaction of M(NMe(2))(4) and R(3)R(2)R(1)SiNH(2). All compounds are notably sensitive to air and moisture. Compounds 1, 2, 4, and 7-10 have been structurally characterized, and all are dimeric, with the general formula [M(NMe(2))(2)(mu-NSiR(3))](2), in which the mu(2)-NSiR(3) groups bridges two four-coordinate metal centers. The hafnium compound 3 possesses the same basic dimeric structure but shows additional incorporation of liberated HNMe(2) bonded to one metal. Compounds 11 and 12 are also both dimeric but also incorporate additional mu(2)-NMe(2) groups, which bridge Si and either Zr or Hf metal centers in the solid state. The Zr and Hf metal centers are both five-coordinated in these species. Aerosol-assisted CVD (AA-CVD) using 4-7 and 9-12 as precursors generates amorphous films containing M, N, Si, C, and O; the films are dominated by MO(2) with smaller contributions from MN, MC and MSiON based on XPS binding energies.

Details

Item Type Articles
CreatorsCosham, S. D., Johnson, A. L., Molloy, K. C. and Kingsley, A. J.
DOI10.1021/ic2015644
DepartmentsFaculty of Science > Chemistry
RefereedYes
StatusPublished
ID Code28046

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