Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3)

Reference:

Lewis, R. W. C., Allsopp, D. W. E., Shields, P., Šatka, A., Yu, S., Topolov, V. Y. and Bowen, C. R., 2012. Nano-Imprinting of Highly Ordered Nano-Pillars of Lithium Niobate (LiNbO3). Ferroelectrics, 429 (1), pp. 62-68.

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Official URL:

http://dx.doi.org/10.1080/00150193.2012.676955

Abstract

Lithium niobate (LiNbO3) is used in applications such as in optoelectronics, surface acoustic wave devices and transducers. In this paper nano-patterning of LiNbO3 wafers at the wafer scale is investigated using a novel low cost and large-area nano-imprinting technique. The formation of nano-scale pillars is presented by nano-imprinting an ordered nickel etch mask by lift-off on a y-cut LiNbO3 wafer. The process lends itself to the development of novel sensors or high temperature nano-scale harvesting structures. Since one potential application for nano-pillars of piezoelectrics is energy harvesting, calculations of relevant figures of merit for LiNbO3 based composites are also presented.

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