Research

Porous silicon bulk acoustic wave resonator with integrated transducer


Reference:

Aliev, G.N., Goller, B., Snow, P.A., Heinrich, H., Yuan, B. and Aigner, R., 2012. Porous silicon bulk acoustic wave resonator with integrated transducer. Nanoscale Research Letters, 7, 378.

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Official URL:

http://dx.doi.org/10.1186/1556-276X-7-378

Abstract

We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.

Details

Item Type Articles
CreatorsAliev, G.N., Goller, B., Snow, P.A., Heinrich, H., Yuan, B. and Aigner, R.
DOI10.1186/1556-276X-7-378
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code30889

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