Porous silicon bulk acoustic wave resonator with integrated transducer
Reference:
Aliev, G.N., Goller, B., Snow, P.A., Heinrich, H., Yuan, B. and Aigner, R., 2012. Porous silicon bulk acoustic wave resonator with integrated transducer. Nanoscale Research Letters, 7, 378.
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Official URL:
http://dx.doi.org/10.1186/1556-276X-7-378
Abstract
We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
Details
| Item Type | Articles |
| Creators | Aliev, G.N., Goller, B., Snow, P.A., Heinrich, H., Yuan, B. and Aigner, R. |
| DOI | 10.1186/1556-276X-7-378 |
| Departments | Faculty of Science > Physics |
| Refereed | Yes |
| Status | Published |
| ID Code | 30889 |
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