Porous silicon bulk acoustic wave resonator with integrated transducer
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We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
|Creators||Aliev, G.N., Goller, B., Snow, P.A., Heinrich, H., Yuan, B. and Aigner, R.|
|Departments||Faculty of Science > Physics|
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