Research

Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions


Reference:

Eslava, S., Kirschhock, C.E.A., Aldea, S., Baklanov, M.R., Iacopi, F., Maex, K. and Martens, J.A., 2009. Characterization of spin-on zeolite films prepared from Silicalite-1 nanoparticle suspensions. Microporous and Mesoporous Materials, 118 (1-3), pp. 458-466.

Related documents:

This repository does not currently have the full-text of this item.
You may be able to access a copy if URLs are provided below. (Contact Author)

Official URL:

http:/dx.doi.org/10.1016/j.micromeso.2008.09.027

Related URLs:

Abstract

Spin-on porous films were prepared on silicon wafers using Silicalite-1 nanozeolite suspensions crystallized from clear solution. The content and size of Silicalite-1 nanocrystals and of residual ∼2-4 nm nanoparticles in the starting suspensions were varied by varying the crystallization time. The films were characterized using scanning electron microscopy, X-ray diffraction, spectroscopic ellipsometry, atomic force microscopy, Fourier transform infrared spectroscopy, ellipsometric porosimetry, impedance analysis and nanoindentation. All the properties of spin-on Silicalite-1 films strongly depended on the composition of the Silicalite-1 suspensions spun onto the support. With increasing Silicalite-1 nanocrystal content, crystallinity, hydrophobicity and porosity increased, while elastic modulus, homogeneity, roughness, and dielectric constant decreased. Their implementation in on-chip interconnects is discussed.

Details

Item Type Articles
CreatorsEslava, S., Kirschhock, C.E.A., Aldea, S., Baklanov, M.R., Iacopi, F., Maex, K. and Martens, J.A.
DOI10.1016/j.micromeso.2008.09.027
Related URLs
URLURL Type
http://www.scopus.com/inward/record.url?scp=57649233534&partnerID=8YFLogxKUNSPECIFIED
DepartmentsFaculty of Engineering & Design > Chemical Engineering
RefereedYes
StatusPublished
ID Code41030

Export

Actions (login required)

View Item