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Aerosol-assisted CVD of antimony sulfide from antimony dithiocarbamates


Reference:

Rodriguez-Castro, J., Mahon, M. F. and Molloy, K. C., 2006. Aerosol-assisted CVD of antimony sulfide from antimony dithiocarbamates. Chemical Vapor Deposition, 12 (10), pp. 601-607.

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Abstract

Asymmetric antimony dithiocarbamates, Sb[S2CN(Me)R](3) (R =Bu, Hex, Bz), can be thermally decomposed under a dynamic vacuum to yield high-purity Sb2S3 rods. These precursors do not, however, have sufficient volatility for low-pressure (LP) CVD, but are soluble in organic solvents and can be exploited in aerosol-assisted (AA) CVD. Sb2S3 can be deposited using the latter procedure, but the film purity is dependent on substrate temperature. As temperature increases the films become more susceptible to oxidation, and the deposition of oxides and mixed oxide/sulfides becomes more prevalent.

Details

Item Type Articles
CreatorsRodriguez-Castro, J., Mahon, M. F. and Molloy, K. C.
DOI10.1002/cvde.200506369
DepartmentsFaculty of Science > Chemistry
RefereedYes
StatusPublished
ID Code4665
Additional InformationID number: ISI:000241774400004

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