Single-source CVD routes to titanium phosphide

Reference:

Blackman, C. S., Carmalt, C. J., Parkin, I. P., Apostolico, L., Molloy, K. C., White, A. J. P. and Williams, D. J., 2002. Single-source CVD routes to titanium phosphide. Journal of the Chemical Society: Dalton Transactions

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Abstract

Treatment of TiCl4 with two equivalents of L (L = PhPH2, Ph2PH, PPh3, CyPH2, Cy2PH, PCy3) resulted in the formation of [TiCl4(L)(2)]. Reaction of TiCl4 with a stoichiometric amount of 1,2-bis(diphenylphosphino)methane (dppm), 1,2-bis(diphenylphosphino)ethane (dppe) and 1,2-bis(diphenylphosphino) propane (dppp) affords [TiCl4(dppm)], [TiCl4(dppe)] and [TiCl4(dppp)], respectively. X-Ray crystal structures of [TiCl4(Cy2PH)(2)] (5) and [TiCl4(dppe)] (9) have been determined. Low pressure chemical vapour deposition (LPCVD) studies of all the compounds revealed that [TiCl4(L)(2)] (L = CyPH2, Cy2PH and PCy3) and [TiCl4(dppm)] can form titanium phosphide thin-films on glass.

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