Modelling and designing GaN piezeoelectric MEMS,
Reference:
Bowen, C., Allsopp, D., Stevens, R., Shields, P. and Wang, W., 2006. Modelling and designing GaN piezeoelectric MEMS,. In: Second International Conference on Multi-Material Micro Manufacture, 2006-01-01, Grenoble.
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Details
| Item Type | Conference or Workshop Items (Paper) |
| Creators | Bowen, C., Allsopp, D., Stevens, R., Shields, P. and Wang, W. |
| Departments | Faculty of Engineering & Design > Electronic & Electrical Engineering |
| Refereed | No |
| Status | Published |
| ID Code | 5826 |
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