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Modelling and designing GaN piezeoelectric MEMS,


Reference:

Bowen, C., Allsopp, D., Stevens, R., Shields, P. and Wang, W., 2006. Modelling and designing GaN piezeoelectric MEMS,. In: Second International Conference on Multi-Material Micro Manufacture, 2006-01-01, Grenoble.

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Details

Item Type Conference or Workshop Items (Paper)
CreatorsBowen, C., Allsopp, D., Stevens, R., Shields, P. and Wang, W.
DepartmentsFaculty of Engineering & Design > Electronic & Electrical Engineering
RefereedNo
StatusPublished
ID Code5826

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