The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si
Reference:
Coleman, P. G., Harding, R. E., Davies, G., Tan, J. and Wong-Leung, J., 2007. The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si. Journal of Materials Science-Materials in Electronics, 18 (7), pp. 695-700.
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Details
| Item Type | Articles |
| Creators | Coleman, P. G., Harding, R. E., Davies, G., Tan, J. and Wong-Leung, J. |
| Departments | Faculty of Science > Physics |
| Refereed | Yes |
| Status | Published |
| ID Code | 8671 |
| Additional Information | ID number: ISI:000246175200004 |
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