Research

Fluorine-vacancy complexes in ultrashallow B-implanted Si


Reference:

Abdulmalik, D. A., Coleman, P. G., Cowern, N. E. B., Smith, A. J., Sealy, B. J., Lerch, W., Paul, S. and Cristiano, F., 2006. Fluorine-vacancy complexes in ultrashallow B-implanted Si. Applied Physics Letters, 89 (5).

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Details

Item Type Articles
CreatorsAbdulmalik, D. A., Coleman, P. G., Cowern, N. E. B., Smith, A. J., Sealy, B. J., Lerch, W., Paul, S. and Cristiano, F.
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code8818
Additional InformationID number: ISI:000239520200055

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