Research

Dynamic shadow mask technique: A universal tool for nanoscience


Reference:

Egger, S., Ilie, A., Fu, Y. T., Chongsathien, J., Kang, D. J. and Welland, M. E., 2005. Dynamic shadow mask technique: A universal tool for nanoscience. Nano Letters, 5 (1), pp. 15-20.

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Abstract

A comprehensive instrument, designed for fabricating nanostructures by evaporation through a dynamic shadow mask in ultrahigh vacuum, is described. The versatility and performance of the instrument is demonstrated through a series of examples, allowing for applications that are impossible to achieve with traditional nanopatterning methods. Clean nanostructures or entire devices made of different materials and on various substrates can be fabricated. The technique is compatible with fundamental surface science and can be easily interfaced with other fabrication and characterization techniques.

Details

Item Type Articles
CreatorsEgger, S., Ilie, A., Fu, Y. T., Chongsathien, J., Kang, D. J. and Welland, M. E.
DOI10.1021/nl0486822
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code8877
Additional InformationID number: ISI:000226327600004

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