Research

Fluorine in silicon: Diffusion, trapping, and precipitation


Reference:

Pi, X. D., Burrows, C. P. and Coleman, P. G., 2003. Fluorine in silicon: Diffusion, trapping, and precipitation. Physical Review Letters, 90 (15).

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Details

Item Type Articles
CreatorsPi, X. D., Burrows, C. P. and Coleman, P. G.
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code9023
Additional InformationID number: ISI:000182320200032

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