Fluorine in silicon: Diffusion, trapping, and precipitation
Reference:
Pi, X. D., Burrows, C. P. and Coleman, P. G., 2003. Fluorine in silicon: Diffusion, trapping, and precipitation. Physical Review Letters, 90 (15).
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Details
| Item Type | Articles |
| Creators | Pi, X. D., Burrows, C. P. and Coleman, P. G. |
| Departments | Faculty of Science > Physics |
| Refereed | Yes |
| Status | Published |
| ID Code | 9023 |
| Additional Information | ID number: ISI:000182320200032 |
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