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Positron annihilation spectroscopy as a diagnostic tool for process monitoring of buried oxide layer formation in Si


Reference:

Coleman, P. G., Knights, A. P. and Anc, M. J., 2003. Positron annihilation spectroscopy as a diagnostic tool for process monitoring of buried oxide layer formation in Si. Journal of Applied Physics, 93 (1), pp. 698-701.

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Details

Item Type Articles
CreatorsColeman, P. G., Knights, A. P. and Anc, M. J.
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code9068
Additional InformationID number: ISI:000180002500106

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