Positron annihilation spectroscopy as a diagnostic tool for process monitoring of buried oxide layer formation in Si
Reference:
Coleman, P. G., Knights, A. P. and Anc, M. J., 2003. Positron annihilation spectroscopy as a diagnostic tool for process monitoring of buried oxide layer formation in Si. Journal of Applied Physics, 93 (1), pp. 698-701.
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Details
Item Type | Articles |
Creators | Coleman, P. G., Knights, A. P. and Anc, M. J. |
Departments | Faculty of Science > Physics |
Refereed | Yes |
Status | Published |
ID Code | 9068 |
Additional Information | ID number: ISI:000180002500106 |
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