Research

Development of a novel tool for semiconductor process control


Reference:

Gwilliam, R. M., Knights, A. P., Wendler, E., Sealy, B. J., Burrows, C. P. and Coleman, P. G., 2001. Development of a novel tool for semiconductor process control. Materials Science & Engineering B - Solid State Materials for Advanced Technology, 80 (1-3), 60-+.

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Details

Item Type Articles
CreatorsGwilliam, R. M., Knights, A. P., Wendler, E., Sealy, B. J., Burrows, C. P. and Coleman, P. G.
DepartmentsFaculty of Science > Physics
RefereedYes
StatusPublished
ID Code9248
Additional InformationID number: ISI:000168260800014

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